A sub-μW micromachined magnetic compass

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 514-517

  Leïchlé, Thierry C ^a   Ye, Wenjing ^b   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE QUALITY; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; MICROMACHINING; NATURAL FREQUENCIES; PERMANENT MAGNETS; RESONATORS; THERMAL EFFECTS; VIBRATIONS (MECHANICAL);

ELECTRONIC COMPASS; MICROMACHINED MAGNETIC COMPASS; MICROMECHANICAL RESONATOR;

COMPASSES (MAGNETIC);

EID: 0037480234     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. J. E. Lenz, "A review of magnetic sensors", Proceedings of the IEEE, vol.78, no.6, June 1990, pp. 973-89.
2. T. C. Leïchlé, M. von Arx, and M. G. Allen, "A Micromachined Resonant Magnetic Field Sensor", Proceedings IEEE Micro Electro Mechanical Systems, Interlaken, Switzerland 21-25 January 2001.
3. R. Legtenberg, A. W. Goeneveld, and M. Elwenspoek, "Comb-drive actuators for large displacements", J. Micromech. Microeng. 6 (1996) 320-329.