A vertical Hall device in CMOS high-voltage technology

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 47-53

  Schurig, Enrico ^a   Demierre, Michel ^a   Schott, Christian ^b   Popovic, Radivoje S ^a  

^a EPFL   (Switzerland)

^b Sentron AG   (Switzerland)

Author keywords

CMOS; Vertical Hall

Indexed keywords

CMOS INTEGRATED CIRCUITS; HALL EFFECT DEVICES; MAGNETIC FIELDS; SEMICONDUCTING SILICON;

CONVENTIONAL SILICON PLATE-SHAPE DEVICES; HIGH VOLTAGE TECHNOLOGY; UNCONVENTIONAL DOPING REDUCTION METHOD; VERTICAL HALL DEVICE;

SENSORS;

EID: 0036544239     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00859-7     Document Type: Conference Paper

References (7)

1. New fully integrated 3D silicon Hall sensor for precise angular position measurements
2. The vertical Hall-effect device
3. Numerical modeling of vertical Hall-effect devices
4. A vertical Hall magnetic field sensor using CMOS-compatible micromachining techniques
5. In-plane sensitive vertical trench-Hall device
6. Complementary metal-oxide-semiconductor-compatible micromachined two-dimensional vertical Hall magnetic field sensor: A modified design
7. Procedure for the production of Hall elements