Micromachined polysilicon resonating xylophone bar magnetometer

Acta Astronautica

Volumn 52, Issue 2-6, 2003, Pages 421-425

  Wickenden, D K ^a   Champion, J L ^a   Osiander, R ^a   Givens, R B ^a   Lamb, J L ^a   Miragliotta, J A ^a   Oursler, D A ^a   Kistenmacher, T J ^a  

^a JOHNS HOPKINS UNIVERSITY APPLIED PHYSICS LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; MAGNETIC FIELDS; MAGNETIC FLUX; MAGNETOMETERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL RESONATORS;

OPTICAL BEAM DEFLECTION;

POLYSILICON;

EID: 0037240760     PISSN: 00945765     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0094-5765(02)00183-2     Document Type: Conference Paper

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