Optical Readouts of Cantilever Bending Designed for High Magnetic Field Application

IEEE Transactions on Magnetics

Volumn 39, Issue 5 II, 2003, Pages 3304-3306

  Keplinger, F ^a   Kvasnica, S ^a   Hauser, H ^a   Grossinger R ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Flux density sensor; Lorentz force; Micromachined cantilever; Optical readout

Indexed keywords

FORCE MEASUREMENT; LIGHT REFLECTION; MICROSENSORS; READOUT SYSTEMS;

OPTICAL READOUTS;

MAGNETIC FIELDS;

EID: 0141884015     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2003.816753     Document Type: Article

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