Monolithic piezoresistive CMOS magnetic field sensors

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 23-32

  Beroulle, Vincent ^a   Bertrand, Yves ^a   Latorre, Laurent ^a   Nouet, Pascal ^a  

^a LIRMM   (France)

Author keywords

CMOS; Ferromagnetic actuation; Lorentz force; Magnetic sensors; MEMS

Indexed keywords

CANTILEVER BEAMS; ETCHING; FERROMAGNETIC MATERIALS; MAGNETIC FIELD EFFECTS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; SENSORS;

MAGNETIC SENSORS;

CMOS INTEGRATED CIRCUITS;

EID: 0037439007     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00317-5     Document Type: Article

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