Magnetic actuation and MOS-transistor sensing for CMOS-integrated resonators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 304-307

  Lange, D ^a   Hagleitner, C ^a   Herzog, C ^a   Brand, O ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC EXCITATION; ELECTROMAGNETIC FIELD EFFECTS; INTEGRATED CIRCUIT MANUFACTURE; MAGNETIC FIELDS; MICROELECTROMECHANICAL DEVICES; MOSFET DEVICES; PERMANENT MAGNETS; PHOTOLITHOGRAPHY; PIEZOELECTRIC DEVICES; RESONATORS; SEMICONDUCTOR DEVICE STRUCTURES;

CANTILEVER RESONATOR; CMOS INTEGRATED RESONATORS; ELECTROMAGNETIC EXCITATION; LORENTZ FORCE; MAGNETIC ACTUATION; WHEATSTONE BRIDGE;

SENSORS;

EID: 0036124022     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. CMOS resonant beam gas sensing system with on-chip self excitation
2. Sensor apparatus and cantilever for it
3. CMOS micromachined cantilever-in-cantilever devices with magnetic actuation
4. Cantilever with integrated resonator for application of scanning probe microscopy
5. CMOS stress sensors on (100) silicon
6. An industrial CMOS process family adapted for the fabrication of smart silicon sensors