Deposition of microcrystalline silicon: Direct evidence for hydrogen-induced surface mobility of Si adspecies

Journal of Applied Physics

Volumn 89, Issue 2, 2001, Pages 1463-1469

  Gerbi, J E ^a   Abelson, J R ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000716758     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1334639     Document Type: Article

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