Formation of highly uniform silicon nanoparticles in high density silane plasmas

Journal of Applied Physics

Volumn 94, Issue 4, 2003, Pages 2277-2283

  Shen, Z ^a   Kim, T ^a   Kortshagen, U ^a   McMurry, P H ^a   Campbell, S A ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; AMORPHOUS MATERIALS; COAGULATION; HYDROGEN; NANOSTRUCTURED MATERIALS; PARTICLE SIZE ANALYSIS; POLYCRYSTALLINE MATERIALS; SILANES; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

VERSATILE SOURCES;

INDUCTIVELY COUPLED PLASMA;

EID: 0041323101     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1591412     Document Type: Article

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