Surface measurement using active vision and light scattering

Optics and Lasers in Engineering

Volumn 45, Issue 1, 2007, Pages 131-139

  Tian, Gui Yun ^a   Lu, Rong Sheng ^b   Gledhill, Duke ^a  

^a UNIVERSITY OF HUDDERSFIELD   (United Kingdom)

^b HEFEI UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Active vision; Light scattering; Speckle pattern; Surface measurement

Indexed keywords

INTEGRATION; LIGHT SCATTERING; SPECKLE; SURFACE ROUGHNESS; SURFACE WAVES; VISION;

ACTIVE VISION; SPECKLE PATTERN; SURFACE WAVINESS;

SURFACE MEASUREMENT;

EID: 33748741713     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2006.03.005     Document Type: Article

References (67)

1. Whitehouse DJ. Handbook of surface and nanometrology. Institute of Physics Publishing (IOP), 2003.
2. White D.J. Stylus contact method for surface metrology in the ascendancy. Meas Control 31 2 (1998) 48-50
3. Poon C.Y., and Bhushan B. Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler. Wear 190 (1995) 76-88
4. Pahk H.J., Stout K., and Blunt L. A comparative study on the three-dimensional surface topography for the polished surface of femoral head. Int J Adv Manuf Technol 16 (2000) 564-570
5. Poon C.Y., and Bhushan B. Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler. Wear 190 (1995) 76-88
6. Bennet J.M., and Mattsson L. Introduction surface roughness and scattering. Optical Society of America (1993)
7. http://micro.magnet.fsu.edu/primer/resources/general.html
8. Pietzsch O., Kubetzka A., Bode M., and Wiesendanger R. Recent advances in spin-polarized scanning tunnelling microscopy. Appl Phys A 78 (2004) 781-785
9. Park Y.B., Ahn K.H., and Park D.W.P. Surface characteristics of MOCVD grown TiO2 films by atomic force microscopy. J Mater Sci Lett 22 (2003) 1325-1328
10. Klapetek P., Ohlidal I., and Navratil K. Atomic force microscopy analysis of statistical roughness of GaAs surfaces originated by thermal oxidation. Microchimica Acta 147 (2004) 175-180
11. Mollica V., Borassi A., Relini A., et al. An atomic force microscopy investigation of protein crystal surface topography. Eur biophys J 30 (2001) 313-318
12. Metchkarov N., Sainov V., and Boone P. High-accuracy surface measurement using laser-diode phase-stepping interferometry. Vacuum 58 2-3 (2000) 464-469
13. Sainov V., and Mechkarov N. CD-R groove measurement by phase stepping interferometry. Opt Laser Eng 36 (2001) 429-435
14. Kozhevatov I.E., and Kh Kulikova E. Interferometric methods for surface testing, High-order white-light interferometer. Instrum Exp Tech 44 1 (2001) 84-87
15. Harasaki A., Schmit J., and Wyant J.C. Improved vertical scanning interferometry. Appl Opt 39 (2000) 2107-2115
16. Guest J.R., Stievater T.H., Chen G., et al. Near-field coherent spectroscopy and microscopy of a quantum dot system. Science 293 (2001) 2224-2227
17. Stelzer E.H.K. Light microscopy-beyond the diffraction limit. Nature 417 (2002) 806-807
18. Hanninen P. Communications arising: Light microscopy-beyond the diffraction limit. Nature 419 (2002) 802
19. Kawata S., Ohtsu M., and Irie M. Nano-Optics (2002), Springer, New York
20. Su X., and Chen W. Fourier transform profilometry: a review. Opt Laser Eng 35 (2001) 263-284
21. Skydan O.A., Lalor M.J., and Burton D.R. Using colured structured light in 3-D surface measurement. Opt Laser Eng 43 (2005) 801-814
22. Balle J., Mouaddib E., and Salvi J. Recent progress in coded structured light as a technique to solve the correspondence problem: a survey. Pattern Recognition 31 7 (1998) 963-982
23. Tian G.Y., Gledhill D., and Taylor D. Comprehensive interest points based imaging mosaic. Pattern Recognition Lett 24 (2003) 1171-1179
24. Al-Kindi G.A., Baul R.M., and Gill K.F. An application of machine vision in the automated inspection of engineering surfaces. Int J Prod Res 30 (1992) 241-553
25. Posdamer J.L., and Altschuler M.D. Surface measurement by space encoded projected beam systems. Comput Graph Image Process 18 1 (1982) 1-17
26. Vuylsteke P., and Oosterlinck A. Range image acquistion with a single binary-encoded light pattern. IEEE Trans Pattern Anal Mach Intelli 12 2 (1990) 148-164
27. Petriu EM, Sakr Z, Spoelder HJW, Moica A. Object recognition using pseudo random color encoded structure light. Instrumentation and Measurement Technology Conference, 2000; In: Proceedings of the 17th IEEE on IMTC, vol. 3: p. 1237-41.
28. Zemcik P, Frydrych M, Kalviainen H, Toivanen P. Multispectral image colour encoding. Proceedings of the 15th International Conference on Pattern Recognition. Barcelona, Spain, September 3-8, vol. 3, 2000. p. 605-8.
29. Lee SK, Lee SH, Choi JS. Depth measurement using frequency analysis with an active projection. Image Process 1999; In: Proceedings of the 1999 International Conference on ICIP, vol. 3, 1999, p. 906-9.
30. Liu W, Wang Z, Mu G, Fang Z. A novel profilometry with color-coded project and its application in 3D reconstruction. The fifth Asia-Pacific Conference on Communications and fourth Optoelectronics and Communications Conference. Beijing, China, October 18-22, vol. 2, 1999. p. 1039-42.
31. Schubert E. Fast 3d object recognition using multiple color coded illumination. In: Proceedings of IEEE International Conference on Acoustics Speech, and Signal Processing. Munich, Germany, April 21-24, vol. 4, 1997. p. 3057-60.
32. Sangwine S.J., and Horne R.E. The colour image processing handbook (1998), Chapman & Hall, London
33. Poularikas A. Digital colour image handbook (2003), CRC Press, Boca Raton, LC
34. Coleman Jr. E.N., and Jain R. Obtaining 3-dimensional shape of textured and specular surfaces using four-source photometry. Comput Graph Image Process 18 (1982) 309-328
35. Bakolias C. Oblique imaging of scattered light for surface inspection. PhD thesis, Department of Mechanical Engineering, Imperial College London, UK, 1996.
36. Azarova V.V., Dmitriev V.G., Lokhov Yu N., and Malitski K.N. Measuring the roughness of high-precision quartz substrates and laser mirrors by angle-resolved scattering. J Opt Technol 69 2 (2002) 125-128
37. Fang K., Adame R., Yang H- N., Wang G- C., and Lu T- M. Measurement of roughness exponent for scale-invariant rough surfaces using angle resolved light scattering. Appl Phys Lett 66 16 (1995) 2077-2079
38. Egorov A.A. Recovery of the characteristics and determination of the parameters of statistical nanometer surface roughness using the data on scattering in a planar optical waveguide. Radio Phys Quantum Electron 43 12 (2000) 980-988
39. Guo L., and Wu Z. Fractal characteristics investigation on light scattering from two dimensional rough surface. Inter J Infrared Millimeter Waves 21 12 (2000) 2099-2106
40. Nicodemus FE, Richmond JC, Hisa JJ, Ginsberg IW, Limperis T, Geometrical considerations and nomenclature for reflectance. NBS Monograph 160, National Bureau of Standards, October 1977.
41. Zhang R., and Shah M. Shape from intensity gradient. IEEE Trans Systems Man Cybern 29 3 (1999) 318-325
42. Zhang R., Tsai P.S., Cryer J.E., and Shah M. Shape from Shading: a Survey. IEEE Trans Pattern Anal Mach Intell 21 8 (1999) 690-706
43. Villa J., and Hurtado-Ramos J.B. Surface shape estimation from photometric images. Opt Laser Eng 42 4 (2004) 461-468
44. Nayar S.K., Ikeuchi K., and Kanade T. Surface reflection: physical and geometrical perspectives. IEEE Trans Pattern Anal Mach Intell 13 7 (1991) 611-634
45. Bakolias C., and Forrest A.K. Dark field, Scheimflug imaging for surface inspection, machine vision application industrial inspection V. Proc of SPIE 3029 (1997) 57-68
46. Reynolds R.L., Karpala F., Clarke D.A., and Hageniers O.L. Theory and applications of a surface inspection technique using double-pass retroreflection. Opt Eng 32 9 (1993) 2122-2129
47. Heida J.H., and Bruinsma A.J.A. D-sight technique for rapid impact damage detection on composite aircraft structures. e-Journal Nondestr Test 4 6 (June 1999)
48. Bals S., Kabius B., Haider M., et al. Annular dark field imaging in a TEM. Solid State Commun 130 10 (2004) 675-680
49. Valdecasas A.G., Marshall D., Becerra J.M., and Terrero J.J. On the extended depth of focus algorithms for bright field microscopy. Micron 32 6 (2001) 559-569
50. Lorincik J., and Fine J. Focusing properties of hemispherical mirrors for total integrating scattering instruments. Appl Opt 36 31 (1997) 8270-8274
51. Azarova V.V., Dmitriev V.G., Lokhov Yu N., and Malitski K.N. Measuring the roughness of high-precision quartz substrates and laser mirrors by angle-resolved scattering. J Opt Technol 69 2 (2002) 125-128
52. Cheng C., and Qi D. Extraction of height probability density of random rough surfaces from the central d-peak of angle-resolved light scattering using the optical inversion algorithm. Appl Phys Lett 81 11 (2002) 2124-2126
53. Fang K., Adame R., Yang H.N., Wang G.C., and Lu T.M. Measurement of roughness exponent for scale-invariant rough surfaces using angle resolved light scattering. Appl Phys Lett 66 16 (1995) 2077-2079
54. Bennett J.M. Recent development in surface roughness characterization. Meas Sci Technol 3 (1992) 1119-1127
55. Goodman JW. Statistical properties of laser speckle patterns. In: Dainty JC, editor. Speckle and related phenomena, vol. 9 of topics in applied physics, Berlin: Springer; 1984, Chapter 2. p. 9-75.
56. May M. Information inferred from the observation of speckles. J Phys E 10 (1977) 849-864
57. Toh S.L., Shang H.M., and Tay C.J. Surface-roughness study using laser speckle method. Opt Laser Eng 29 2-3 (1998) 217-225
58. Pedersen H.M. On the contrast of polychromatic speckle patterns and its dependence on surface roughness. Opt Acta 22 1 (1975) 15-24
59. Hamed A.M., Ei-Chandoor H., Ei-Diasty F., and Saudy M. Analysis of speckle images to assess surface roughness. Opt Laser Technol 36 (2004) 249-253
60. Leonard L.C., and Toal V. Roughness measurement of metallic surfaces based on the laser speckle contrast method. Opt Lasers Eng 30 (1998) 433-440
61. Cheng C., Liu C., et al. Absolute measurement of roughness and lateral-correlation length of random surfaces by use of the simplified model of image-speckle contrast. Appl Opt 41 20 (2002) 4148-4156
62. Yoshimura T., Kato K., and Nakaeawa K. Surface roughness dependence of the intensity correlation function under speckle pattern illumination. J Opt Soc Am A 7 (1990) 2254-2259
63. Toh S.L., Quan C., Woo K.C., Tay C.J., and Shang H.M. Whole field surface roughness measurement by laser speckle correlation technique. Opt Laser Technol 33 (2001) 427-434
64. Hinsch K.D., Fricke-Begenann T., Gulker G., and Wolff K. Speckle correlation for the analysis of random processes at rough surfaces. Opt Lasers Eng 33 (2000) 87-105
65. Spagnolo G.S., Paoletti D., Paoletti A., and Ambrosini D. Roughness measurement by electronic speckle correlation and mechanical profilometry. Measurement 20 4 (1997) 243-249
66. Joenathan C., Torroba R., and Henao R. Surface roughness effects in dual beam illumination speckle interferometers-- Theoretical study. Optik 112 4 (2001) 163-168
67. Lu R.S., and Tian G.Y. On-line Measurement of Surface Roughness by Laser Light Scattering. Meas Sci Technol 17 (2006) 1-7