Measuring the roughness of high-precision quartz substrates and laser mirrors by angle-resolved scattering

Journal of Optical Technology (A Translation of Opticheskii Zhurnal)

Volumn 69, Issue 2, 2002, Pages 125-128

  Azarova, V V ^a   Dmitriev, V G ^a   Lokhov, Yu N ^a   Malitskii K N ^a  

^a Polyus Research Institute   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FREQUENCIES; INTERFEROMETRY; LASER APPLICATIONS; MIRRORS; OPTICAL PROPERTIES; SPUTTER DEPOSITION; STATISTICAL METHODS; SUBSTRATES; SURFACE ROUGHNESS;

ANGLE RESOLVED SCATTERING; LASER MIRRORS; WHITE LIGHT INTERFEROMETRY;

SURFACE MEASUREMENT;

EID: 0036478187     PISSN: 10709762     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOT.69.000125     Document Type: Article

References (8)

1. Determination of precise optical surface roughness parameters using ARS data