High-accuracy surface measurement using laser-diode phase-stepping interferometry

Vacuum

Volumn 58, Issue 2, 2000, Pages 464-469

  Metchkarov, N ^a   Sainov, V ^a   Boone, P ^b  

^a CENTRAL LABORATORY OF OPTICAL STORAGE AND PROCESSING OF INFORMATION   (Bulgaria)

^b GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CONTINUOUS WAVE LASERS; INTERFEROMETRY; NICKEL PLATING; SUBSTRATES; SURFACE MEASUREMENT;

PHASE STEPPING INTERFEROMETRY;

SEMICONDUCTOR LASERS;

EID: 0034250643     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(00)00206-2     Document Type: Article

References (10)

1. Ishii Y., Chen J., Murata K. Opt Lett. 12:1987;233-235.
2. Tatsuno K., Tsunoda Y. Appl Opt. 26:1987;37-40.
3. Hariharan P. Appl Opt. 28:1989;27-29.
4. Onodera R., Ishii Y. Proc SPIE. 1720:1992;458-463.
5. Rastogi PK, editor. Holographic interferometry. Berlin: Springer, 1994.
6. Onodera R., Ishii Y. J Opt Soc Am A. 13(1):1996;139-146.
7. Sainov V., Stoilov G., Tonchev D., Dragostinov T. Akad Verlag Series in Opt Metr. 2:1996;52-60.
8. Kartashev A.I. Opt Spectr. 9:1960;204-206.
9. Tychinski V. Opt Comm. 81:1990;131.
10. Martin O.J.F., Dereux A., Girard C. J Opt Soc Am A. 11:1994;1073.