CD-R groove measurement by phase stepping interferometry

Optics and Lasers in Engineering

Volumn 36, Issue 5, 2001, Pages 429-435

  Sainov, V ^a   Mechkarov, N ^a  

^a CENTRAL LABORATORY OF OPTICAL STORAGE AND PROCESSING OF INFORMATION   (Bulgaria)

Author keywords

3D measurement; Phase stepping interferometry

Indexed keywords

COPPER; HELIUM NEON LASERS; HOLOGRAMS; INTERFEROMETRY; POLYCARBONATES; REFRACTIVE INDEX; SUBSTRATES;

PHASE STEPPING INTERFEROMETRY;

STAMPING;

EID: 0035500173     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(01)00070-7     Document Type: Article

References (9)

1. Multifunctional phase-stepping interferometer
2. High-accuracy surface measurement using laser-diode phase-stepping interferometry
3. Interferometric microscope for investigation of biological objects
4. Laser microrefractometer
5. Resolution for off-axis illumination
6. Effect of numerical aperture on interference fringe spacing
7. Method for adaptive unwrapping using a criterion for maximum probability of the information reliability
8. Noise-residue filtering of interferometric phase images