The mechanism of amine formation on Si(1 0 0) activated with chlorine atoms

Surface Science

Volumn 600, Issue 17, 2006, Pages 3363-3374

  Finstad, Casey C ^a   Thorsness, Adam G ^a   Muscat, Anthony J ^a  

^a University of Arizona   (United States)

Author keywords

Amine; Ammonia; Chlorine; Photoelectron spectroscopy; Silicon; Silicon nitride; Surface chemical reaction

Indexed keywords

ACTIVATION ENERGY; ALUMINA; AMINES; ATOMS; CHLORINE; DISSOCIATION; ELECTROSTATICS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHLORINE ATOMS; ELECTROSTATIC INTERACTIONS; SILICON MONOCHLORIDE; SURFACE CHEMICAL REACTION;

SILICON NITRIDE;

EID: 33748298781     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.05.023     Document Type: Article

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