Overview on surface microstructuring by photodesorption etching of chlorinated silicon

Progress in Surface Science

Volumn 54, Issue 3-4, 1997, Pages 287-314

  Rhodin, T N ^a   Paulsen Boaz, C ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; CHEMISORPTION; CHLORINE; ELECTRONS; ETCHING; MICROSTRUCTURE; PHOTOEMISSION; PHOTOIONIZATION; QUANTUM THEORY; SEMICONDUCTING SILICON;

MICROETCHING; PHOTODESORPTION ETCHING; SURFACE MICROSTRUCTURING;

SURFACE STRUCTURE;

EID: 0031098365     PISSN: 00796816     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0079-6816(97)00010-5     Document Type: Article

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46. This is an area of extensive research. Some representative papers include: C. Paulsen-Boaz, W.L. O'Brien and T.N. Rhodin, J. Vac. Sci. Technol. B 10, 216 (1992); T.N. Rhodin, C. Paulsen-Boaz and W.L. O'Brien, Surf. Sci. 283, 109 (1993); M. Kawasaki, H. Sato, N. Nishi, J. Appl. Phys. 65., 792 (1989); W. Sesselmann, E. Hudeczek, and F. Bachmann, J. Vac. Sci. Technol. B7, 1304 (1989); Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase, and H. Okano, Appl. Phys. A44, 313 (1987); E. Ikawa, S. Sugito and Y. Kurogi, Surf. Sci. 183, 276 (1987); P. Mogyorosi, K. Piglmayer, R. Kullmer, and D. Bauerle, Appl. Phys. A 45, 293 (1988); R. de Jonge, J. Majoor, K. Benoist, and D. de Vries, Europhys. Lett. 2, 843 (1986); H. Okano, Y. Horiike and M. Sekine, Jpn. J. Appl. Phys. 24, 68 (1985).
47. This is an area of extensive research. Some representative papers include: C. Paulsen-Boaz, W.L. O'Brien and T.N. Rhodin, J. Vac. Sci. Technol. B 10, 216 (1992); T.N. Rhodin, C. Paulsen-Boaz and W.L. O'Brien, Surf. Sci. 283, 109 (1993); M. Kawasaki, H. Sato, N. Nishi, J. Appl. Phys. 65., 792 (1989); W. Sesselmann, E. Hudeczek, and F. Bachmann, J. Vac. Sci. Technol. B7, 1304 (1989); Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase, and H. Okano, Appl. Phys. A44, 313 (1987); E. Ikawa, S. Sugito and Y. Kurogi, Surf. Sci. 183, 276 (1987); P. Mogyorosi, K. Piglmayer, R. Kullmer, and D. Bauerle, Appl. Phys. A 45, 293 (1988); R. de Jonge, J. Majoor, K. Benoist, and D. de Vries, Europhys. Lett. 2, 843 (1986); H. Okano, Y. Horiike and M. Sekine, Jpn. J. Appl. Phys. 24, 68 (1985).
48. This is an area of extensive research. Some representative papers include: C. Paulsen-Boaz, W.L. O'Brien and T.N. Rhodin, J. Vac. Sci. Technol. B 10, 216 (1992); T.N. Rhodin, C. Paulsen-Boaz and W.L. O'Brien, Surf. Sci. 283, 109 (1993); M. Kawasaki, H. Sato, N. Nishi, J. Appl. Phys. 65., 792 (1989); W. Sesselmann, E. Hudeczek, and F. Bachmann, J. Vac. Sci. Technol. B7, 1304 (1989); Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase, and H. Okano, Appl. Phys. A44, 313 (1987); E. Ikawa, S. Sugito and Y. Kurogi, Surf. Sci. 183, 276 (1987); P. Mogyorosi, K. Piglmayer, R. Kullmer, and D. Bauerle, Appl. Phys. A 45, 293 (1988); R. de Jonge, J. Majoor, K. Benoist, and D. de Vries, Europhys. Lett. 2, 843 (1986); H. Okano, Y. Horiike and M. Sekine, Jpn. J. Appl. Phys. 24, 68 (1985).
49. This is an area of extensive research. Some representative papers include: C. Paulsen-Boaz, W.L. O'Brien and T.N. Rhodin, J. Vac. Sci. Technol. B 10, 216 (1992); T.N. Rhodin, C. Paulsen-Boaz and W.L. O'Brien, Surf. Sci. 283, 109 (1993); M. Kawasaki, H. Sato, N. Nishi, J. Appl. Phys. 65., 792 (1989); W. Sesselmann, E. Hudeczek, and F. Bachmann, J. Vac. Sci. Technol. B7, 1304 (1989); Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase, and H. Okano, Appl. Phys. A44, 313 (1987); E. Ikawa, S. Sugito and Y. Kurogi, Surf. Sci. 183, 276 (1987); P. Mogyorosi, K. Piglmayer, R. Kullmer, and D. Bauerle, Appl. Phys. A 45, 293 (1988); R. de Jonge, J. Majoor, K. Benoist, and D. de Vries, Europhys. Lett. 2, 843 (1986); H. Okano, Y. Horiike and M. Sekine, Jpn. J. Appl. Phys. 24, 68 (1985).
50. This is an area of extensive research. Some representative papers include: C. Paulsen-Boaz, W.L. O'Brien and T.N. Rhodin, J. Vac. Sci. Technol. B 10, 216 (1992); T.N. Rhodin, C. Paulsen-Boaz and W.L. O'Brien, Surf. Sci. 283, 109 (1993); M. Kawasaki, H. Sato, N. Nishi, J. Appl. Phys. 65., 792 (1989); W. Sesselmann, E. Hudeczek, and F. Bachmann, J. Vac. Sci. Technol. B7, 1304 (1989); Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase, and H. Okano, Appl. Phys. A44, 313 (1987); E. Ikawa, S. Sugito and Y. Kurogi, Surf. Sci. 183, 276 (1987); P. Mogyorosi, K. Piglmayer, R. Kullmer, and D. Bauerle, Appl. Phys. A 45, 293 (1988); R. de Jonge, J. Majoor, K. Benoist, and D. de Vries, Europhys. Lett. 2, 843 (1986); H. Okano, Y. Horiike and M. Sekine, Jpn. J. Appl. Phys. 24, 68 (1985).
51. This is an area of extensive research. Some representative papers include: C. Paulsen-Boaz, W.L. O'Brien and T.N. Rhodin, J. Vac. Sci. Technol. B 10, 216 (1992); T.N. Rhodin, C. Paulsen-Boaz and W.L. O'Brien, Surf. Sci. 283, 109 (1993); M. Kawasaki, H. Sato, N. Nishi, J. Appl. Phys. 65., 792 (1989); W. Sesselmann, E. Hudeczek, and F. Bachmann, J. Vac. Sci. Technol. B7, 1304 (1989); Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase, and H. Okano, Appl. Phys. A44, 313 (1987); E. Ikawa, S. Sugito and Y. Kurogi, Surf. Sci. 183, 276 (1987); P. Mogyorosi, K. Piglmayer, R. Kullmer, and D. Bauerle, Appl. Phys. A 45, 293 (1988); R. de Jonge, J. Majoor, K. Benoist, and D. de Vries, Europhys. Lett. 2, 843 (1986); H. Okano, Y. Horiike and M. Sekine, Jpn. J. Appl. Phys. 24, 68 (1985).
52. This is an area of extensive research. Some representative papers include: C. Paulsen-Boaz, W.L. O'Brien and T.N. Rhodin, J. Vac. Sci. Technol. B 10, 216 (1992); T.N. Rhodin, C. Paulsen-Boaz and W.L. O'Brien, Surf. Sci. 283, 109 (1993); M. Kawasaki, H. Sato, N. Nishi, J. Appl. Phys. 65., 792 (1989); W. Sesselmann, E. Hudeczek, and F. Bachmann, J. Vac. Sci. Technol. B7, 1304 (1989); Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase, and H. Okano, Appl. Phys. A44, 313 (1987); E. Ikawa, S. Sugito and Y. Kurogi, Surf. Sci. 183, 276 (1987); P. Mogyorosi, K. Piglmayer, R. Kullmer, and D. Bauerle, Appl. Phys. A 45, 293 (1988); R. de Jonge, J. Majoor, K. Benoist, and D. de Vries, Europhys. Lett. 2, 843 (1986); H. Okano, Y. Horiike and M. Sekine, Jpn. J. Appl. Phys. 24, 68 (1985).
53. This is an area of extensive research. Some representative papers include: C. Paulsen-Boaz, W.L. O'Brien and T.N. Rhodin, J. Vac. Sci. Technol. B 10, 216 (1992); T.N. Rhodin, C. Paulsen-Boaz and W.L. O'Brien, Surf. Sci. 283, 109 (1993); M. Kawasaki, H. Sato, N. Nishi, J. Appl. Phys. 65., 792 (1989); W. Sesselmann, E. Hudeczek, and F. Bachmann, J. Vac. Sci. Technol. B7, 1304 (1989); Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase, and H. Okano, Appl. Phys. A44, 313 (1987); E. Ikawa, S. Sugito and Y. Kurogi, Surf. Sci. 183, 276 (1987); P. Mogyorosi, K. Piglmayer, R. Kullmer, and D. Bauerle, Appl. Phys. A 45, 293 (1988); R. de Jonge, J. Majoor, K. Benoist, and D. de Vries, Europhys. Lett. 2, 843 (1986); H. Okano, Y. Horiike and M. Sekine, Jpn. J. Appl. Phys. 24, 68 (1985).
54. This is an area of extensive research. Some representative papers include: C. Paulsen-Boaz, W.L. O'Brien and T.N. Rhodin, J. Vac. Sci. Technol. B 10, 216 (1992); T.N. Rhodin, C. Paulsen-Boaz and W.L. O'Brien, Surf. Sci. 283, 109 (1993); M. Kawasaki, H. Sato, N. Nishi, J. Appl. Phys. 65., 792 (1989); W. Sesselmann, E. Hudeczek, and F. Bachmann, J. Vac. Sci. Technol. B7, 1304 (1989); Y. Horiike, N. Hayasaka, M. Sekine, T. Arikado, M. Nakase, and H. Okano, Appl. Phys. A44, 313 (1987); E. Ikawa, S. Sugito and Y. Kurogi, Surf. Sci. 183, 276 (1987); P. Mogyorosi, K. Piglmayer, R. Kullmer, and D. Bauerle, Appl. Phys. A 45, 293 (1988); R. de Jonge, J. Majoor, K. Benoist, and D. de Vries, Europhys. Lett. 2, 843 (1986); H. Okano, Y. Horiike and M. Sekine, Jpn. J. Appl. Phys. 24, 68 (1985).
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