Monte Carlo simulation of anomalous erosion in large area sputter magnetrons

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2005, Pages 254-259

  Buyle, G ^a   Depla, D ^a   Eufinger, K ^a   De Gryse, R ^a   De Bosscher, W ^b  

^a GHENT UNIVERSITY   (Belgium)

^b Bekaert sa   (Belgium)

Author keywords

DC magnetron plasma; Large area coating; Plasma simulation; Sputter deposition

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; MAGNETIC FIELD EFFECTS; MONTE CARLO METHODS; PLASMA SIMULATION; SPUTTER DEPOSITION;

DC MAGNETRON PLASMA; LARGE AREA COATING;

MAGNETRON SPUTTERING;

EID: 33644984748     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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