Effect of nitrogen addition on the properties and thermal stability of fluorinated amorphous carbon films

Thin Solid Films

Volumn 510, Issue 1-2, 2006, Pages 125-133

  Lai, Chia Han ^a   Lai, Wei Shun ^a   Chiue, Hua Chun ^a   Chen, Hung Jen ^a   Chang, Shou Yi ^b   Lin, Su Jien ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Carbon; Chemical vapor deposition; Flourinated carbon; Mechanical properties; Nitrogeneration; Thermal stability

Indexed keywords

ADDITION REACTIONS; CARBON; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); MECHANICAL PROPERTIES; MORPHOLOGY; NITROGEN; THERMODYNAMIC STABILITY;

DEPOSITION RATES; FEED GASES; FLOURINATED CARBON; NITROGENERATION;

AMORPHOUS FILMS;

EID: 33747613562     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.274     Document Type: Article

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