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Volumn 42, Issue 8, 2001, Pages 3761-3769
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Fluorine incorporation in plasma-polymerized octofluorocyclobutane, hexafluoropropylene and trifluoroethylene
a
b
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Author keywords
Fluoropolymer; Low dielectric; Plasma polymerization
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Indexed keywords
COPPER;
FLUORINE;
HEXAFLUOROPROPYLENE;
OCTOFLUOROCYCLOBUTANE;
OXYGEN;
POLYMER;
SOLVENT;
TRIFLUOROETHYLENE;
UNCLASSIFIED DRUG;
ARTICLE;
CRYSTAL STRUCTURE;
DIELECTRIC CONSTANT;
FILM;
INTEGRATED CIRCUIT;
POLYMERIZATION;
PRESSURE;
REFRACTION INDEX;
SURFACE PROPERTY;
TEMPERATURE;
DIELECTRIC MATERIALS;
MOLECULAR STRUCTURE;
MONOMERS;
PERMITTIVITY;
PLASMA POLYMERIZATION;
REFRACTIVE INDEX;
SENSITIVITY ANALYSIS;
SUBSTRATES;
SURFACE ROUGHNESS;
HEXAFLUOROPROPYLENES;
OCTOFLUOROCYCLOBUTANES;
TRIFLUOROETHYLENES;
FLUORINE CONTAINING POLYMERS;
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EID: 0034746611
PISSN: 00323861
EISSN: None
Source Type: Journal
DOI: 10.1016/S0032-3861(00)00693-5 Document Type: Article |
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Times cited : (78)
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References (18)
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