Preparation and structural analysis of micro-patterned Pb(Zr,Ti)O 3 film by metalorganic chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 6 A, 2006, Pages 5102-5106

  Yokoyama, Shintaro ^a   Takahashi, Kenji ^a   Okamoto, Shoji ^a   Nagai, Atsushi ^a   Minamidate, Jun ^a   Saito, Keisuke ^b   Ohashi, Naoki ^c   Haneda, Hajime ^c   Sakata, Osami ^d   Kimura, Shigeru ^d   Nishida, Ken ^e   Katoda, Takashi ^e   Funakubo, Hiroshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b BRUKER AXS INC   (United States)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^d JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^e KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Crystallinity; Electrode; MOCVD; Patterning; Piezoresponse; PZT

Indexed keywords

CRYSTAL STRUCTURE; ELECTRODES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSCOPIC EXAMINATION; SEMICONDUCTING FILMS; STRUCTURAL ANALYSIS; SUBSTRATES;

CRYSTALLINITY; PATTERNING; PIEZORESPONSE; PZT; SCANNING PROBE MICROSCOPY;

METALLIC FILMS;

EID: 33745226978     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.5102     Document Type: Article

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