Drv etching of sol-gel pzt

Materials Research Society Symposium - Proceedings

Volumn 546, Issue , 1999, Pages 159-164

  Zeto, R ^a   Rod, B ^a   Dubey, M ^a   Ervin, M ^a   Conrad, J ^a   Piekarz, R ^b   Troliermckinstry, S ^b   Su, T ^b   Shepard, J ^b  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CRYSTALLIZATION; DRY ETCHING; LEAD COMPOUNDS; MILLING (MACHINING); PIEZOELECTRIC MATERIALS; RAPID THERMAL ANNEALING; REACTIVE ION ETCHING; SOL-GELS; SOLVENTS; SUBSTRATES; THIN FILMS;

ARGON ION MILLING;

DIELECTRIC FILMS;

EID: 0033337893     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)

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