Self-organized (100)-/(001)-preferred orientation in Pb(Zr,Ti)O3 films grown on polycrystalline substrates by metalorganic chemical vapor deposition

Integrated Ferroelectrics

Volumn 59, Issue , 2003, Pages 1429-1436

  Yokoyama, S ^a   Ozeki, T ^a   Oikawa, T ^a   Funakubo, H ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Deposition rate; MOCVD; Orientation; PZT; Self organized growth

Indexed keywords

CRYSTAL ORIENTATION; GROWTH (MATERIALS); LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PIEZOELECTRICITY; POLYCRYSTALLINE MATERIALS; TITANIUM OXIDES; ZIRCONIA;

DEPOSITION RATE; EPITAXIAL FILMS; PZT FILMS; SELF ORGANIZED GROWTH;

FERROELECTRIC THIN FILMS;

EID: 27744596589     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580390259885     Document Type: Article

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