Transport studies of carbon-rich a-SiCx:H film through admittance and deep-level transient spectroscopy measurements

Philosophical Magazine

Volumn 86, Issue 19, 2006, Pages 2771-2796

  Atilgan, I ^a   Ozdemir, O ^a   Akaoglu, B ^a   Sel, K ^a   Katircioglu, B ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEEP LEVEL TRANSIENT SPECTROSCOPY; MISFET DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; THIN FILMS; TRANSPORT PROPERTIES;

CHARGE INJECTION; METAL INSULATOR SEMICONDUCTOR (MIS) STRUCTURE; SILICON SUBSTRATE;

SILICON CARBIDE;

EID: 33646897080     PISSN: 14786435     EISSN: 14786443     Source Type: Journal    
DOI: 10.1080/14786430500377791     Document Type: Article

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