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Volumn 82, Issue 1, 2002, Pages 35-46

Structural and optical properties of hydrogenated amorphous silicon-carbon alloys grown by plasmaenhanced chemical vapour deposition at various rf powers

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EID: 0037050627     PISSN: 13642812     EISSN: None     Source Type: Journal    
DOI: 10.1080/13642810208211214     Document Type: Article
Times cited : (39)

References (26)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.