Characterization of amorphous silicon carbon alloys by IBA technique and optical spectroscopy

Vacuum

Volumn 67, Issue 3-4, 2002, Pages 519-523

  Gracin, D ^a   Jaksic, M ^a   Bogdanovic Radovic, I ^a   Medunic, Z ^a   Car, T ^a   Pracek, B ^b  

^a RUDER BO KOVI INSTITUTE   (Croatia)

^b Institute of Surface Engineering and Optoelectronics Ljubljana   (Slovenia)

Author keywords

Amorphous silicon carbide; ERDA; IR; Quantitative analysis; Raman; RBS

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SILICON CARBIDE; THIN FILMS;

OPTICAL SPECTROSCOPY;

AMORPHOUS ALLOYS;

EID: 0037179744     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00242-7     Document Type: Conference Paper

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