Analysis of the standard deviation of surface potential fluctuations in MOS interface from DLTS spectra

Modelling and Simulation in Materials Science and Engineering

Volumn 6, Issue 3, 1998, Pages 261-271

  Özder, Serhat ^a   Atilgan, Ismail ^a   Katircioglu, Bayram ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

DEEP LEVEL TRANSIENT SPECTROSCOPY; INTERFACES (MATERIALS); MATHEMATICAL MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SURFACE PHENOMENA; SURFACE PROPERTIES; THERMAL EFFECTS;

BREWS MODEL; NICOLLIAN-GOETZBERGER MODEL; SURFACE POTENTIAL;

MOS DEVICES;

EID: 0032068944     PISSN: 09650393     EISSN: None     Source Type: Journal    
DOI: 10.1088/0965-0393/6/3/005     Document Type: Article

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