Medium range ordering of amorphous silicon-carbon alloys studied by GISAXS, optical spectroscopy and IBA

Thin Solid Films

Volumn 459, Issue 1-2, 2004, Pages 216-219

  Gracin, D ^a   Dubcek, P ^a   Zorc, H ^a   Juraic, K ^a  

^a RUDER BO KOVI INSTITUTE   (Croatia)

Author keywords

Amorphous silicon carbide; Elastic recoil detection analysis (ERDA); Fourier transform infrared (FTIR); Grazing incidence small angle X ray scattering (GISAXS); Nano structure; Raman; Rutherford back scattering (RBS)

Indexed keywords

AMORPHOUS FILMS; CARBON; COMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGEN; HYDROGENATION; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON CARBIDE; STOICHIOMETRY; SYNCHROTRON RADIATION; X RAY SCATTERING;

AMORPHOUS SILICON CARBIDE; ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

THIN FILMS;

EID: 2942585292     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.12.086     Document Type: Conference Paper

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