Simulation and fabrication of SiO2-based piezoresistive microbridges for chem/biosensors

Journal of Micromechanics and Microengineering

Volumn 16, Issue 4, 2006, Pages 692-698

  Lu, Yanqing ^a   Chivukula, Venkata ^a   Wang, Ming ^a   Ji, Hai Feng ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; BORON; DOPING (ADDITIVES); NITROGEN; PIEZOELECTRICITY; SURFACE PROPERTIES;

DOPING CONCENTRATIONS; MICROBRIDGES; PIEZORESISTIVE SILICON;

SILICA;

EID: 33645071315     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/4/004     Document Type: Article

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