Design, fabrication and modeling of microbeam structures for gas sensor applications in CMOS technology

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 3, Issue , 2003, Pages

  Voiculescu, Ioana ^a   Zaghloul, Mona ^a   McGill, R Andrew ^b  

^a The George Washington University   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; DRY ETCHING; FABRICATION; FINITE ELEMENT METHOD; MICROPROCESSOR CHIPS; MICROSTRUCTURE; SORPTION; VAPORS;

MICROBEAM STRUCTURES;

TRANSDUCERS;

EID: 0038758819     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. H. Baltes, D. Lange, A. Koll, "The electronic nose in Lilliput" IEEE Spectrum, September 1998, pages 35-38.
2. D. Lange, O.Brand, H. Baltes, CMOS cantilever sensor system, Springer, 2002.
3. R. A. McGill, M. H. Abraham, J. W. Grate, "Choosing polymer coatings for chemical sensors", CHEMTECH 24 (1994), pages 27-37.
4. G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, L.R. Carley, "Laminated high-aspect-ratio microstructures in a conventional CMOS process". Sensors and Actuators A57 (1996), pages 103-110.
5. Carnegie Mellon University web page: http://www.ece.cmu.edu/research/chips/openhouse/Gary.pdf
6. D. F. Guillou, S. Santhanam, L.R.Carley. "Laminated, sacrificial-poly MEMS technology in standard CMOS". Sensors and Actuators 85 (2000), pages 346-355.
7. Personal communication from Dr. Gary Fedder, Carnegie Melon University, USA.
8. O. Brand, H. Baltes. "Thermally exited silicon oxide beam and bridge resonators in CMOS technology". IEEE Transactions on electron devices, vol. 40, no. 10, October 1993, pp. 1745-1753.