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Volumn 6, Issue 2, 1997, Pages 136-141

Performance of GaAs microbridge thermocouple infrared detectors

Author keywords

Gallium arsenide; Heat transport; Infrared detectors; Thermocouple

Indexed keywords

COMPUTER SIMULATION; ELECTRIC MEASURING BRIDGES; HEAT TRANSFER; MATHEMATICAL MODELS; PERFORMANCE; SEMICONDUCTING GALLIUM ARSENIDE; SENSITIVITY ANALYSIS; THERMOCOUPLES;

EID: 0031162060     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.585791     Document Type: Article
Times cited : (14)

References (14)
  • 1
    • 0027617112 scopus 로고
    • CMOS as sensor technology
    • June-Aug.
    • H. Baltes, "CMOS as sensor technology," Sens. Actuators A, vol. 37-38, pp. 51-56, June-Aug. 1993.
    • (1993) Sens. Actuators A , vol.37-38 , pp. 51-56
    • Baltes, H.1
  • 2
    • 50749135332 scopus 로고
    • Thermoelectric radiation microsensors
    • T. Elbel, S. Poser, and H. Fischer, "Thermoelectric radiation microsensors," Sens. Actuators A, vol. 41-42, nos. 1-3, pp. 493-496, 1994.
    • (1994) Sens. Actuators A , vol.41-42 , Issue.1-3 , pp. 493-496
    • Elbel, T.1    Poser, S.2    Fischer, H.3
  • 3
    • 0027615155 scopus 로고
    • Thermoelectric infrared sensors in CMOS technology
    • June-Aug.
    • R. Lenggenhager, H. Baltes, and T. Elbel, "Thermoelectric infrared sensors in CMOS technology," Sens. Actuators A, vol. 37-38, pp. 216-220, June-Aug. 1993.
    • (1993) Sens. Actuators A , vol.37-38 , pp. 216-220
    • Lenggenhager, R.1    Baltes, H.2    Elbel, T.3
  • 4
    • 0026476186 scopus 로고
    • Polysilicon as a material for microsensor applications
    • E. Obermeier and P. Kopystynski, "Polysilicon as a material for microsensor applications," Sens. Actuators A, vol. 30, nos. 1-2, pp. 149-155, 1992.
    • (1992) Sens. Actuators A , vol.30 , Issue.1-2 , pp. 149-155
    • Obermeier, E.1    Kopystynski, P.2
  • 5
    • 0026928424 scopus 로고
    • Micromechanically structurized sensors on GaAs: An integrated anemometer
    • K. Fricke, H. L. Hartnagel, S. Ritter, and J. Würfl, "Micromechanically structurized sensors on GaAs: An integrated anemometer," Microelec. Eng., vol. 19, nos. 1-4, pp. 195-198, 1992.
    • (1992) Microelec. Eng. , vol.19 , Issue.1-4 , pp. 195-198
    • Fricke, K.1    Hartnagel, H.L.2    Ritter, S.3    Würfl, J.4
  • 7
    • 0029272825 scopus 로고
    • Infrared thermopile sensor based on AlGaAs-GaAs micromachining
    • A. Dehé, K. Fricke, and H. L. Hartnagel, "Infrared thermopile sensor based on AlGaAs-GaAs micromachining," Sens. Actuators A, vol. 46-47, no. 1-3, pp. 432-436, 1995.
    • (1995) Sens. Actuators A , vol.46-47 , Issue.1-3 , pp. 432-436
    • Dehé, A.1    Fricke, K.2    Hartnagel, H.L.3
  • 9
    • 0016951459 scopus 로고
    • Preferential etching of GaAs through photoresist masks
    • M. Otsubo, T. Oda, H. Kumabe, and H. Miki, "Preferential etching of GaAs through photoresist masks," J. Electrochem. Soc., vol. 123, no. 5, pp. 676-680, 1976.
    • (1976) J. Electrochem. Soc. , vol.123 , Issue.5 , pp. 676-680
    • Otsubo, M.1    Oda, T.2    Kumabe, H.3    Miki, H.4
  • 10
    • 0020909661 scopus 로고
    • Chemical ething characteristics of (001) GaAs
    • S. Adachi and K. Oe, "Chemical ething characteristics of (001) GaAs," J. Electrochem. Soc., vol. 130, no. 12, pp. 2427-2435, 1983.
    • (1983) J. Electrochem. Soc. , vol.130 , Issue.12 , pp. 2427-2435
    • Adachi, S.1    Oe, K.2
  • 13
    • 0022813826 scopus 로고
    • Thermal sensors based on the seebek effect
    • A. W. van Herwaarden and P. M. Sarro, "Thermal sensors based on the seebek effect," Sens. Actuators, vol. 10, nos. 3-4, pp. 321-346, 1986.
    • (1986) Sens. Actuators , vol.10 , Issue.3-4 , pp. 321-346
    • Van Herwaarden, A.W.1    Sarro, P.M.2
  • 14
    • 0004242004 scopus 로고
    • Properties of gallium arsenide
    • London, U.K.: Inspec
    • "Properties of gallium arsenide," in EMIS Datareviews Series 2. London, U.K.: Inspec, 1986.
    • (1986) EMIS Datareviews Series 2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.