Fabrication of piezoelectric AL0.3GA0.7AS heterostructures

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 5, Issue , 2003, Pages 51-56

  Kumar, Parshant ^a   Li, Lihua ^a   Calhoun, L C ^b   Boudreaux, P ^b   DeVoe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b LABORATORY FOR PHYSICAL SCIENCES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; HETEROJUNCTIONS; INDUCTIVELY COUPLED PLASMA; MICROACTUATORS; MICROSENSORS; MOLECULAR BEAM EPITAXY; OPTIMIZATION; PIEZOELECTRIC DEVICES; PIEZOELECTRIC TRANSDUCERS; REACTIVE ION ETCHING; SEMICONDUCTING ALUMINUM COMPOUNDS; SINGLE CRYSTALS;

MINIATURIZATION; PROCESS DEVELOPMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 1942520363     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-41601     Document Type: Conference Paper

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