Microbridge testing of thin films under small deformation

Materials Research Society Symposium - Proceedings

Volumn 594, Issue , 2000, Pages 477-482

  Zhang, T Y ^a   Su, Y J ^a   Qian, C F ^a,b   Zhao, M H ^a,c   Chen, L Q ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b BEIJING UNIVERSITY OF CHEMICAL TECHNOLOGY   (China)

^c ZHENGZHOU RESEARCH INSTITUTE OF MECHANICAL ENGINEERING   (China)

Author keywords

[No Author keywords available]

Indexed keywords

NANOINDENTATION;

ANNEALING; CHEMICAL VAPOR DEPOSITION; DEFORMATION; ELASTIC MODULI; FINITE ELEMENT METHOD; RESIDUAL STRESSES; SEMICONDUCTING SILICON; SILICON NITRIDE; STRESS ANALYSIS; THIN FILMS;

SEMICONDUCTING FILMS;

EID: 0033658783     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)

1. W. D Nix, Metall. Trans. A 20A, 2217 (1989).
2. F.R. Brotzen, Int. Mater. Rev. 39, 24 (1994).
3. M.F. Doerner, and W.D. Nix, Critical Rev. Solid State & Mater. Sci. 14, 225 (1988).
4. R.P. Vinci, and J.J. Vlassak, Annu. Rev. Mater. Sci. 26, 431 (1996).
5. P.A. Flinn, MRS Proceedings 130, 41 (1988).
6. S. Hong, T.P. Weihs, J.C. Bravman, and W.D. Nix, J. Electro. Mater. 19, 903 (1990).
7. L.M. Zhang, D.Uttamchandani, and B.Culshaw, Sensors & Actuators A 29, 79 (1991)
8. J.A. Knapp, D.M. Follstaedt, S.M. Myers, J.C. Barbour, and T.A. Friedmann, J. Appl. Phys. 85, 1460 (1999).
9. J. P. Hirth, and J. Lothe, Theory of Dislocations, 2nd ed. (John Wiley & Sons, Inc., 1982).
10. T.Y. Zhang, Y.J. Su, C.F. Qian, M.H. Zhao and L.Q. Chen, Submitted to Acta Mater.