Optically excited self-resonant microbeams

Sensors and Actuators, A: Physical

Volumn 52, Issue 1-3, 1996, Pages 92-98

  Zook, J David ^a   Burns, David W ^a   Herb, William R ^a   Guckel, Henry ^b   Kang, Joon Won ^b   Ahn, Yongchul ^b  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

Fiber optic sensors; Resonant sensors; Self resonance; Silicon microstructures

Indexed keywords

LIGHT MODULATORS; LIGHT REFLECTION; NATURAL FREQUENCIES; PHOTODIODES; RESONANCE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR LASERS; STRAIN GAGES; TRANSDUCERS;

OPTOMECHANICAL MODULATORS; PHOTOVOLTAIC EXCITATION; SELF RESONANT POLYSILICON MICROBEAMS; SILICON MICROSTRUCTURES;

FIBER OPTIC SENSORS;

EID: 0030102355     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80131-2     Document Type: Article

References (29)

1. B. Dieulesaint, D. Royer and C. Bonnefoy, Mechanical excitation of a membrane by an optical beam, 1981 Ultrasonics Symp., IEEE Press, 1981, pp.802-805.
2. S. Venkatesh and B. Culshaw, Optically activated vibrations in a micromachined silica structure, Electron. Lett., 21 (1985) 315-317.
3. M.V. Andres, M.J. Tudor and K.W.H. Foulds, Analysis of an interferometric optical fiber detection technique applied to silicon vibrating sensors, Electron. Lett., 22 (1986) 1097-1099.
4. K.E.B. Thornton, D. Uttamchandani and B. Culshaw, Temperature dependence of resonant frequency in optically excited diaphragms, Electron. Lett., 22 (1986) 1232-1234.
5. D. Uttamchandani, K.E.B. Thornton and B. Culshaw, Optically excited resonant beam pressure sensor, Electron. Lett., 23 (1987) 1333-1334.
6. M.V. Andres, M.J. Tudor and K.W.H. Foulds, Analysis of an interferometric optical fiber detection technique applied to silicon vibrating sensors, Electron. Lett., 23 (1987) 774-775.
7. B. Culshaw, Optically excited resonant sensors, in Fiber Optic Sensors, IOP Publishing, Bristol, 1987, pp.33-44.
8. W. Benecke, A. Heuberger, W. Riethmuller, U. Schnakenberg, H. Wolfelschneider, R. Kist, G. Knoll, S. Ramakrishnan and H. Hofflin, Optically excited mechanical vibrations in micromachined silicon cantilever structures, Proc. 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan, 2-5 June, 1987, Institute of Electrical Engineers, Japan, 1987, pp. 838-848.
9. R.E. Jones, J.M. Naden and R.C. Neat, Optical fiber sensors using micromachined silicon resonant elements, IEEE Proc., 135 (Part D, No. 5) (1988) 353-358.
10. M.J. Tudor, M.V. Andres, K.W.H. Foulds and J.M. Naden, Silicon resonator sensors: interrogation techniques and characteristics, IEEE Proc., 135 (Part D, No. 5) (1988) 364-368.
11. N.A.D. Stokes, R.M.A. Fatah and S. Venkatesh, Self-excitation in fiber-optic microresonator sensors, Sensors and Actuators, A21-A23 (1990) 369-372.
12. S.M. Kozel, V.N. Listvin and A.V. Churenkov, Photothermal self-excitation of mechanical microresonators, Opt.Spectrosc. (USSR), 69 (1990) 401-402.
13. R.J. Pitcher, K.W.H. Foulds, J.A. Clements and J.M. Naden, Optothermal drive of silicon resonators: the influence of surface coatings, Sensors and Actuators, A21-A23 (1990) 387-390.
14. R.M.A. Fatah, Detection of microresonator vibrations in fiber optic systems, in K.T.V. Grattan (ed.), Sensors - Technology Systems and Applications, Adam Hilger, Bristol, 1991, pp. 363-366.
15. S.M. Kozel, V.N. Listvin and A.V. Churenkov, Optical excitation of mechanical microresonators, Sov. Tech. Phys. Lett., 17 (1991) 804-805.
16. R.M.A. Fatah, Mechanisms of optical activation of micromechanical resonators, Sensors and Actuators A, 33 (1992) 229-236.
17. A.V. Churenkov, Photothermal excitation and self-excitation of silicon microresonators, Sensors and Actuators A, 39 (1993) 141-148.
18. D. Angelidis and P. Parsons, Optical micromachined pressure sensor for aerospace applications, Opt. Eng., 31 (1992) 1638-1642.
19. D.W. Bums, Micromechanics of integrated sensors and the planar processed pressure transducer, Ph.D. Thesis, Department of Material Science, University of Wisconsin, Madison, WI, 1988.
20. H. Guckel, J.J. Sniegowski, T.R. Christenson and F. Rossi, The application of fine-grained, tensile polysilicon to mechanically resonant transducers, Sensors and Actuators, A21-A23 (1989) 346-356.
21. H. Guckel, Surface micromachined pressure transducers, Sensors and Actuators A, 28 (1991) 133-146.
22. J.J. Sniegowski, Design and fabrication of the polysilicon resonating beam force transducer, Ph.D. Thesis, Department of Nuclear Engineering and Engineering Physics, University of Wisconsin, Madison, WI, 1991.
23. J.D. Zook, D.W. Burns, H. Guckel, J.J. Sniegowski, R.L. Engelstad and Z. Feng, Characteristics of polysilicon resonant microbeams, Sensors and Actuators A, 35 (1992) 51-59.
24. H. Guckel, M. Nesnidal, J.D. Zook and D.W. Burns, Optical drive/ sense for high-Q resonant microbeams, Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7-10 June, 1993, Institute of Electrical Engineers, Japan, 1993, pp. 686-689.
25. H.A.C. Tilmans, Micro-mechanical Sensors Using Encapsulated Built-in Strain Gauges, Febodruck Printers, Enshede, The Netherlands, 1993.
26. D.W. Burns, J.D. Zook, R.D. Horning, W.R. Herb and H. Guckel, Sealed-cavity resonant microbeam pressure sensor, Sensors and Actuators A, 48 (1995) 179-186.
27. D.W. Burns, R.D. Horning, W.R. Herb, J.D. Zook, and H. Guckel, Sealed-cavity resonant microbeam accelerometer, Sensors and Actuators A, 53 (1996) 249-255.
28. J.D. Zook, D.W. Burns, J.N. Schoess and H. Guckel, Optically resonant microbeams, SPIE Proc., Vol. 2383A, Conf. Miniaturized Systems with Micro-optics and Micromechanics, Photonics 1995, San Jose, CA, USA, February 1995.
29. R.M. Warner and B.L. Grung, Semiconductor-Device Electronics, Holt, Rinehart and Winston, Philadelphia, 1991, p. 445.