Deformation control of microbridges for flow sensors

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 197-201

  Matsuura, Tsukasa ^a   Taguchi, Motohisa ^a   Kawata, Kaoru ^a   Tsutsumi, Kazuhiko ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

Deformation; Flow sensors; Microbridge; Pt SiNx film; Residual stress

Indexed keywords

BUCKLING; DEFORMATION; ETCHING; METALLIC FILMS; MICROELECTRONICS; PLATINUM; SEMICONDUCTING SILICON COMPOUNDS;

DEFORMATION CONTROL; FILM STRUCTURES; MICROBRIDGE FLOW SENSOR;

SENSORS;

EID: 0031141825     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01351-4     Document Type: Article

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