Capacitive microbeam resonator design

Journal of Micromechanics and Microengineering

Volumn 11, Issue 1, 2001, Pages 70-80

  Ahn, Yongchul ^a   Guckel, Henry ^a   Zook, J David ^b  

^a University of Wisconsin Madison   (United States)

^b HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; NATURAL FREQUENCIES; PRESSURE EFFECTS; RESONATORS; STRAIN MEASUREMENT; THERMAL EFFECTS; TRANSDUCERS;

MICROBEAM RESONATORS; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0035130019     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/1/311     Document Type: Article

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