Design, simulation and fabrication of a bridge structure microtransducer

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 265-268

  Zang, Ming ^a   Zurn, Shayne M ^a   Polla, Dennis L ^a   Nelson, Bradley J ^a   Robbins, William P ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

And Deep trench RIE; Microsensor; Microtransducer; PZT thin film; PZT thin film bridge

Indexed keywords

DEEP TRENCH RIE; MICROTRANSDUCERS; PZT THIN FILM BRIDGE; PZT THIN FILMS;

ATMOSPHERIC HUMIDITY; COMPUTER SIMULATION; ETCHING; FINITE ELEMENT METHOD; FLUIDICS; MANUFACTURE; MICROACTUATORS; MICROMACHINING; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; SENSORS; SILICON WAFERS; TEMPERATURE DISTRIBUTION; THIN FILM DEVICES;

TRANSDUCERS;

EID: 6344284760     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. C. Lee, T. Itoh, and T. Suga, "Micromachined Piezoelectric Force Sensors Based on PZT Thin Films", IEEE Trans. Ultrason., Ferroelect, Freq. Contr., vol. 43, pp. 553-9, 1996.
2. D.L. Polla, SPIE, Int. Soc. Opt. Eng., vol. 3064, pp. 24-7, 1997.
3. 3 (x=0.2-0.75) films: Comparison of metallo-organic decomposition and sol-gel processes", J. Appl. Phys. 72, pp. 1566-76, 1992.
4. M. Zang, D. L. Polla, S. Zurn, and T. Cui, "Stress and Deformation of PZT Thin Film on Silicon Wafer due to Thermal Expansion", in Multicomponent Oxide Films for Electronics, Proc. MRS, vol. 574, Spring Meeting, San Francisco, CA, April 5-9, pp. 107-10, 1999.