Simulation and design of a resonant polysilicon microbridge

Proceedings of the International Semiconductor Conference, CAS

Volumn 2, Issue , 2001, Pages 573-576

  Vasile, Gabriel ^a   Lepadatu, Cristian ^a   Moldovan, Carmen ^a   Nedelcu, Oana ^a  

^a UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; CONDUCTIVE MATERIALS; LASER BEAMS; MICROELECTROMECHANICAL DEVICES; MONTE CARLO METHODS; NATURAL FREQUENCIES; POLYSILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS;

ELECTROMECHANICAL MODEL; MICROBRIDGE;

MICROSENSORS;

EID: 0035744107     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Resonant microsensors
2. Detection of volatile organic compounds with polymer coated cantilevers
3. Electrotechnics basic lessons
4. The vibrations of the elastic systems
5. Mathematical complements for electrical and telecommunications engineers