Design and analysis of a PZT-based micromachined acoustic sensor with increased sensitivity

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 10, 2005, Pages 1840-1850

  Wang, Zheyao ^a   Wang, Chao ^a   Liu, Litian ^a,b  

^a TSINGHUA UNIVERSITY   (China)

^b China Institute of Electronics CIE   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SENSORS; INTERDIGITAL ELECTRODES (IDE); PARTIAL CAPACITANCE;

ACOUSTIC DEVICES; CONFORMAL MAPPING; MICROSENSORS;

PIEZOELECTRIC TRANSDUCERS;

EID: 28444485365     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1561640     Document Type: Article

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