Working equations for piezoelectric actuators and sensors

Journal of Microelectromechanical Systems

Volumn 8, Issue 4, 1999, Pages 529-533

  Weinberg, Marc S ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MATHEMATICAL MODELS; MATRIX ALGEBRA; SENSORS; ZINC OXIDE;

PIEZOELECTRIC BEAMS;

PIEZOELECTRIC DEVICES;

EID: 0033338026     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.809069     Document Type: Article

References (10)

1. J. Smits and W.-S. Choi, "The constituent equations of piezoelectric heterogeneous bimorphs," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 38, pp. 256-270, May 1991.
2. D. DeVoe and A. Pisano, "Modeling and optimal design of piezoelectric cantilever microactuators," J. Microelectromech. Syst., vol. 6, pp. 266-270, Sept. 1997.
3. S. Timoschenko, "Analysis of Bi-metal thermostats,", J. Opt. Soc. Amer., vol. 11, no. 3, pp. 233-256, Sept. 1925.
4. S. Crandall and N. Dahl, An Introduction to the Mechanics of Solids. New York, McGraw-Hill, 1959.
5. A. Petrovich, M. Weinberg, and J. Williams, "Quartz monolithic accelerometer," U.S. Patent 5 315874, May 31, 1994.
6. M. Weinberg, "Quartz tuning fork gyroscope," U.S. Patent 5 388 458, Feb. 14, 1995.
7. A. Kourepenis, A. Petrovich, and M. Weinberg, "Development of a monolithic quartz resonator accelerometer," in Proc. 14th Biennial Guidance Test Symp., Holloman AFB, NM, Oct. 2-4, 1989.
8. A. Kourepenis, A. Petrovich, and M. Weinberg, "Low cost quartz resonant accelerometer for aircraft inertial navigation," in Transducers' 91 Dig. Tech. Papers, June 24, 1991.
9. H. Woodson and J. Melcher. Electromechanical Dynamics. New York: Wiley, vol. 1, 1968.
10. R. J. Roark and W. Young, Formulas for Stress and Strain, 5th ed. New York: McGraw-Hill, 1975.