Piezoelectrically actuated flextensional micromachined ultrasound transducers - I: Theory

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 49, Issue 5, 2002, Pages 573-584

  Perçin, Gokhan ^a,b   Khuri Yakub, Butrus T ^a,c  

^a IEEE   (United States)

^b ADEPTIENT   (United States)

^c STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLASSICAL THIN PLATE THEORY; FLEXTENSIONAL TRANSDUCER; MINDLIN PLATE THEORY;

EQUIVALENT CIRCUITS; MATHEMATICAL MODELS; MICROMACHINING; PIEZOELECTRIC MATERIALS;

ULTRASONIC TRANSDUCERS;

ARTICLE; COMPUTER SIMULATION; ELECTROMAGNETIC FIELD; IMPEDANCE; MECHANICAL STRESS; MOTION; SENSITIVITY AND SPECIFICITY; THEORETICAL MODEL; TRANSDUCER; ULTRASOUND;

COMPUTER SIMULATION; ELECTRIC IMPEDANCE; ELECTROMAGNETIC FIELDS; MODELS, THEORETICAL; MOTION; SENSITIVITY AND SPECIFICITY; STRESS, MECHANICAL; TRANSDUCERS; ULTRASONICS;

EID: 0036557926     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2002.1002456     Document Type: Article

References (17)

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