Design and fabrication of a lead zirconate titanate (PZT) thin film acoustic sensor

Integrated Ferroelectrics

Volumn 54, Issue , 2003, Pages 595-606

  Polcawich, R G ^a   Scanlon, M ^a   Pulskamp, J ^a   Clarkson, J ^a   Conrad, J ^a   Washington, D ^a   Piekarz, R ^a   Trolier Mckinstry, S ^b   Dubey, M ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Acoustic sensor; MEMS; Microphone; PZT

Indexed keywords

ACOUSTIC SENSORS; HEART MONITORING; LEAD ZIRCONATE TITANATE (PZT); MICROPHONE;

HEARING AIDS; MICROELECTROMECHANICAL DEVICES; MICROPHONES; PEROVSKITE; REACTIVE ION ETCHING; THIN FILMS;

MICROSENSORS;

EID: 28444487637     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580390259010     Document Type: Article

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