Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer

Sensors and Actuators, A: Physical

Volumn 92, Issue 1-3, 2001, Pages 168-174

  Beeby, S P ^a   Grabham, N J ^a   White, N M ^b  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b NONE

Author keywords

Accelerometer; PZT; Thick film

Indexed keywords

ACTUATORS; LEAD COMPOUNDS; PIEZOELECTRIC MATERIALS; SILICON; THICK FILMS;

PIEZOELECTRIC MICROMACHINED SILICON ACCELEROMETER; THICK FILM PRINTING;

ACCELEROMETERS;

EID: 0035426147     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00559-3     Document Type: Article

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