Piezoelectric bimorph microphone built on micromachined parylene diaphragm

Journal of Microelectromechanical Systems

Volumn 12, Issue 6, 2003, Pages 892-898

  Niu, Meng Nian ^a   Kim, Eun Sok ^b  

^a University of Hawaii at Manoa   (United States)

^b University of Southern California ^*  (United States)

Author keywords

MEMS microphone; Multilayered plates; Parylene diaphragm; Piezoelectric bimorph; Rayleigh Ritz method; ZnO

Indexed keywords

DIAPHRAGMS; EQUIVALENT CIRCUITS; PIEZOELECTRIC TRANSDUCERS; SIGNAL TO NOISE RATIO; SILICON NITRIDE; ZINC OXIDE;

MULTILAYERED PLATES; PARYLENE DIAPHRAGM; PIEZOELECTRIC BIMORPH MICROPHONE; RAYLEIGH-RITZ METHOD;

MICROPHONES;

EID: 0742321646     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.820288     Document Type: Article

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