Design optimization of beam-like ferroelectrics-silicon microphone and microspeaker

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 49, Issue 2, 2002, Pages 266-270

  Tian Ling, Ren ^a   Lin Tao, Zhang ^a   Li Tian, Liu ^a   Zhi Jian, Li ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MATERIALS; MACHINE DESIGN; OPTIMIZATION; PIEZOELECTRICITY; SENSITIVITY ANALYSIS;

MICROSPEAKERS;

MICROPHONES;

ACOUSTICS; ARTICLE; ELECTRONICS; HEARING AID; HEARING IMPAIRMENT; HUMAN; PROSTHESIS; TRANSDUCER;

ACOUSTICS; DEAFNESS; HEARING AIDS; HUMANS; MINIATURIZATION; PROSTHESIS DESIGN; TRANSDUCERS;

EID: 0036462530     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.985710     Document Type: Article

References (9)

1. Fabrication of silicon condensor microphones using single wafer technology
2. ZnO on Si integrated acoustic sensor
3. Piezoelectric cantilever microphone and microspeaker
4. Residual-stress compensation in clamped-clamped micromachined plates
5. Fabrication and characterization of PZT thin-film vibrators for micromotors
6. 3 thick film micro actuator
7. Modeling and optimal design of piezoelectric cantilever microactuators
8. Electromechanical analysis of an asymmetric piezoelectric/elastic laminate structure: Theory and experiment
9. Dynamic admittance matrix of piezoelectric cantilever bimorphs