Micromachined piezoelectric membrane acoustic device

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 130-134

  Ko, Sang Choon ^a   Kim, Yong Chul ^b   Lee, Seung Seob ^b   Choi, Seung Ho ^c   Kim, Sang Ryong ^d  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b Pohang University of Science and Technology (POSTECH)   (South Korea)

^c Seoul National University of Science and Technology   (South Korea)

^d Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Membrane; Microphone; Microspeaker; ZnO piezoelectric thin film

Indexed keywords

LASER DOPPLER VELOCIMETERS; MEMBRANES; MICROMACHINING; MICROPHONES; THIN FILMS;

PIEZOELECTRIC THIN FILMS;

PIEZOELECTRIC DEVICES;

EID: 0037438989     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00310-2     Document Type: Conference Paper

References (4)

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2. R.P. Ried, E.S. Kim, M. Hong, R.S. Muller, Piezoelectric microphone with on-chip CMOS circuits, J. MEMS 2 (3) (1993) 111-120.
3. S.S. Lee, R.P. Ried, R.M. White, Piezoelectric cantilever microphone and microspeaker, J. MEMS 5 (4) (1996) 238-242.
4. J.J. Neumann Jr., K.J. Gabriel, CMOS-MEMS membrane for audio-frequency acoustic actuation, MEMS'01, 2001, pp. 236-239.