Application of on-wafer TRL calibration on the measurement of microwave properties of Ba 0.5Sr 0.5TiO 3 thin films

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 48, Issue 6, 2001, Pages 1640-1647

  Lue, Hang Ting ^a   Tseng, Tseung Yuen ^a,b  

^a IEEE   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COPLANAR WAVEGUIDE TRANSMISSION LINE; PHASE-SHIFTER DEVICE; QUASI-TRANSVERSE ELECTROMAGNETIC ANALYSIS; THROUGH LINE REFLECT CALIBRATION TECHNIQUE;

ATTENUATION; BARIUM COMPOUNDS; CONFORMAL MAPPING; DIELECTRIC LOSSES; ELECTRIC LINES; ELECTROMAGNETIC WAVE POLARIZATION; FERROELECTRIC THIN FILMS; IMPEDANCE MATCHING (ELECTRIC); INSERTION LOSSES; MICROWAVE MEASUREMENT; PERMITTIVITY; WAVEGUIDES;

ELECTRON DEVICE TESTING;

ARTICLE;

EID: 0035498428     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.971716     Document Type: Article

References (13)

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8. Conformal mapping of the field and charge distributions in multilayered substrate CPW's
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12. Laser ablated ferroelectric and superconducting thin films for microwave applications