Parylene-diaphragm piezoelectric acoustic transducers

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 148-152

  Han, Cheol Hyun ^a   Kim, Eun Sok ^a  

^a UNIVERSITY OF HAWAII   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; DIAPHRAGMS; DIELECTRIC FILMS; EVAPORATION; MASKS; MICROELECTRODES; PIEZOELECTRIC DEVICES; RESIDUAL STRESSES; SILICON NITRIDE; ZINC OXIDE;

PARYLENE-DIAPHRAGM PIEZOELECTRIC ACOUSTIC TRANSDUCERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033724455     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (2)