Silicon microphones

AES: Journal of the Audio Engineering Society

Volumn 44, Issue 1-2, 1996, Pages 16-21

  Sessler, Gerhard M ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; ACOUSTIC WAVES; AMPLIFIERS (ELECTRONIC); ELECTRIC CURRENTS; FIELD EFFECT TRANSISTORS; LIGHT PROPAGATION; MODULATION; OPTICAL WAVEGUIDES; PIEZOELECTRIC DEVICES; SEMICONDUCTING SILICON; SENSORS;

ACOUSTIC SENSOR; MICROMACHINED WAVEGUIDE; PIEZORESISTIVE PRINCIPLES; SIGNAL PROCESSING ELECTRONICS; SILICON MICROPHONES; TWO CHIP CONDENSER MICROPHONES;

MICROPHONES;

EID: 0029733299     PISSN: 00047554     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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