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Volumn 8, Issue 3, 1998, Pages 230-238

Piezoelectric cantilever acoustic transducer

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; FREQUENCY RESPONSE; MICROMACHINING; PERFORMANCE; PIEZOELECTRIC MATERIALS; SENSITIVITY ANALYSIS;

EID: 0032164248     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/3/009     Document Type: Article
Times cited : (34)

References (21)
  • 3
    • 0026854694 scopus 로고
    • Micromachined subminiature condenser microphones in silicon
    • Kuhnel W and Hess G 1992 Micromachined subminiature condenser microphones in silicon Sensors Actuators A 32 560-4
    • (1992) Sensors Actuators A , vol.32 , pp. 560-564
    • Kuhnel, W.1    Hess, G.2
  • 10
    • 0010232913 scopus 로고
    • MS Thesis Department of Electrical Engineering, University of Michigan
    • Putty M W 1988 Polysilicon resonant microstructures MS Thesis Department of Electrical Engineering, University of Michigan
    • (1988) Polysilicon Resonant Microstructures
    • Putty, M.W.1
  • 12
    • 0026119384 scopus 로고
    • Resonant sensors and application
    • Hauptmann P 1991 Resonant sensors and application Sensors Actuators A 25-27 371-7
    • (1991) Sensors Actuators A , vol.25-27 , pp. 371-377
    • Hauptmann, P.1
  • 13
    • 0019899469 scopus 로고
    • Piezoelectric thin film for SAW applications
    • Shiosaki T and Kawabata A 1982 Piezoelectric thin film for SAW applications Ferroelectrics 42 219-32
    • (1982) Ferroelectrics , vol.42 , pp. 219-232
    • Shiosaki, T.1    Kawabata, A.2
  • 14
    • 0016079820 scopus 로고
    • Low-frequency piezoelectric transducer applications of ZnO film
    • Shiosaki T and Kawabata A 1974 Low-frequency piezoelectric transducer applications of ZnO film Appl. Phys. Lett. 25 10
    • (1974) Appl. Phys. Lett. , vol.25 , pp. 10
    • Shiosaki, T.1    Kawabata, A.2
  • 17
    • 0026237368 scopus 로고
    • Electric model and electric properties of sputtered polycrystalline ZnO films
    • Blom F R, van de Pol F C M, Bauhuis G and Popma Th J A 1991 Electric model and electric properties of sputtered polycrystalline ZnO films Thin Solid Films 204 365-76
    • (1991) Thin Solid Films , vol.204 , pp. 365-376
    • Blom, F.R.1    Van De Pol, F.C.M.2    Bauhuis, G.3    Popma, Th.J.A.4
  • 21
    • 0019033186 scopus 로고
    • Postdeposition annealing behavior of RF sputtered ZnO films
    • Lad R J, Funkenbusch P D and Aita C R 1980 Postdeposition annealing behavior of RF sputtered ZnO films J. Vac. Sci. Technol. 17 808-11
    • (1980) J. Vac. Sci. Technol. , vol.17 , pp. 808-811
    • Lad, R.J.1    Funkenbusch, P.D.2    Aita, C.R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.