Experimental studies of O2/Ar plasma in a planar inductive discharge

Plasma Sources Science and Technology

Volumn 8, Issue 1, 1999, Pages 22-30

  Gudmundsson, J T ^a,b   Kimura, Takashi ^a,c   Lieberman, M A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF ICELAND   (Iceland)

^c NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; COMPOSITION EFFECTS; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTRON ENERGY LEVELS; FUNCTIONS; OXYGEN; PLASMA PROBES; PRESSURE EFFECTS; PROBABILITY; VOLTAGE MEASUREMENT;

ELECTRON ENERGY PROBABILITY FUNCTIONS (EEPF); ELECTRON TEMPERATURE; LANGMUIR PROBES; PLASMA DISCHARGES; PLASMA POTENTIAL;

PLASMAS;

EID: 0033076099     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/8/1/003     Document Type: Article

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