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Volumn 3, Issue 3, 2002, Pages 113-119
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Flow behavior at the embossing stage of nanoimprint lithography
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Author keywords
Capillary force; Embossing stage; Nanoimprint lithography; Numerical simulation; Surface tension
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Indexed keywords
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EID: 2442479009
PISSN: 12299197
EISSN: None
Source Type: Journal
DOI: 10.1007/BF02892627 Document Type: Article |
Times cited : (68)
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References (12)
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