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Volumn 3, Issue 3, 2002, Pages 113-119

Flow behavior at the embossing stage of nanoimprint lithography

Author keywords

Capillary force; Embossing stage; Nanoimprint lithography; Numerical simulation; Surface tension

Indexed keywords


EID: 2442479009     PISSN: 12299197     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02892627     Document Type: Article
Times cited : (68)

References (12)
  • 12
    • 85033640158 scopus 로고    scopus 로고
    • University of Groningen, Groningen
    • E. Schaffer, Ph. D. Thesis, University of Groningen, Groningen, 2001.
    • (2001)
    • Schaffer, E.1    Thesis, P.D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.