The mechanics of nanoimprint forming

Materials Research Society Symposium Proceedings

Volumn 841, Issue , 2005, Pages 15-26

  Cross, Graham L W ^a   Langford, Richard M ^a   O'Connell, Barry S ^a   Pethica, John B ^a  

^a TRINITY COLLEGE DUBLIN   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEFECTS; ELASTICITY; INDENTATION; ION BEAMS; LITHOGRAPHY; NANOTECHNOLOGY; PLASTIC DEFORMATION; RESIDUAL STRESSES; RHEOLOGY; SHEAR STRESS; STIFFNESS; STRAIN; VISCOPLASTICITY;

ELASTIC STRESSES; NANOIMPRINTING FORMING; PATTERN TRANSFER; SURFACE PATTERNING;

FORMING;

EID: 23844528134     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom. J. Vac. Sci. Technol., B, 14:4129-4133, 1996.
2. Y. Bocharov, S. Kobayashi, and E. G. Thomsen. ASME J. Eng. Ind., 84:491-501, 1962.
3. H. Ike, J. Mater. Process. Technol., 138:250-255, 2003.
4. G. Thomas. Transmission Electron Microscopy of Metals. Wiley, 1962.
5. K. L. Johnson. Contact Mechanics. Oxford University Press, 1985.
6. S. Y. Chou, C. Keimel, and J. Gu. Nature, 417:835-837, 2002.
7. M. Colburn, S. Johnson, M. Stewart, S. Damle, T. Bailey, B. Choi, M. Wedlake, T. Michaelson, S.V. Sreenivasan, J.G. Ekerdt, and C.G. Willson. Step and flash imprint lithography: A new approach to high resolution patterning. In Proc. SPIE 3676(1), page 379, 1999.
8. Y. Xia and G. M. Whitesides. Soft lithography. Annu. Rev. Mater. Sci., 28:153-184, 1998.
9. G. L. W. Cross, B. S. O'Connell, J. B. Pethica, and W. Oliver. In Proc. IEEE-Nano 2003, pages 494-497, 2003.
10. H. C. Scheer and H. Schulz. Microelectronic Engineering, 56:311-332, 2001.
11. H. Schift and L. J. Heyderman. Nanorheology. Squeeze Flow in Hot Embossing of Thin Films, chapter 3. Alternative Lithography. Kluwer Academic/Plenum, 2003.
12. H. D. Rowland and W. P. King. J. Micromech. Microeng., 14:1625-1632, 2004.
13. J. B. Pethica, R. Hutchings, and W. C. Oliver. Phil. Mag. A, 48:593-606, 1983.
14. L. H. Sperling. Introduction to Physical Polymer Science. John Wiley & Sons, 2001.
15. J. C. M. Li. Mater. Sci. Eng., A285:207-212, 2003.
16. C. A. Schuh and T. G. Nieh. J. Mater. Res., 19:46-57, 2004.
17. G. L. W. Cross, B. S. O'Connell, and J. B. Pethica. 2004. Submitted to Applied Physics Letters.
18. J. B. Pethica and W. C. Oliver. In Material Research Society Symposium O Proceedings, volume 130, page 13, 1989.